KAWAI OPTICS CO.,LTD., Vacuum Evaporation Deposition, Equipment, Phone:81-550-89-5481

KAWAI OPTICS CO.,LTD
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Evaporation Technology
ก Principle of Evaporation
In evaporation the substrate is placed inside a vacuum chamber (less 1.0E-3Pa), in which a block (source:metal,oxide) of the material to be deposited is also located. The source material is then heated to the point where it starts to boil and evaporate. The vacuum is required to allow the molecules to evaporate freely in the chamber, and they subsequently condense on all surface of substrate.
Principle of Evaporation ƒMain Evaporation Materials„
‚`‚Œ ‚`‚•
‚b‚ ‚b‚’
‚b‚• ‚f‚…
‚h‚Ž ‚m‚‰
‚o‚‚ ‚o‚”
‚r‚‰ ‚r‚Ž
‚s‚‰ ‚v
‚x ‚y‚Ž
‚`‚Œ2‚n3 ‚a‚‚e2
‚b‚’2‚n3 ‚g‚†‚n2
‚h‚Ž2‚n3 ‚l‚‡‚e2
‚r‚‰‚n2 ‚r‚‰‚n
‚s‚‰‚n2 ‚s‚2‚n5
‚v‚n3 ‚y‚Ž‚r
Nb2O5
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ก Principle of Sputtering
The substrate is placed in a vacuum chamber(less 1.0E-2Pa) with the source material, named a target, and an inert gas (such as argon) is introduced at low pressure. A gas plasma is struck using an RF power source, causing atoms of the the source material to break off from the target in vapor form and condense on all surfaces including the substrate.
Principle of Sputtering ƒMain Sputtering Material„
‚`‚Œ ‚`‚•
‚b‚ ‚b‚’
‚b‚• ‚l‚
‚m‚‚ ‚m‚‰
‚o‚„ ‚o‚”
‚q‚• ‚r‚‰
‚r‚Ž ‚s‚
‚s‚‰ ‚v
‚`‚Œ2‚n3 ‚e‚…2‚n3
‚h‚Ž2‚n3 ‚r‚‰‚m
‚r‚‰‚n2 ‚r‚Ž‚n2
‚s‚2‚n5 ‚s‚‰‚m
‚s‚‰‚n2   
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ก Principle of Optical Film
Principle of Optical Film Optical film consists of the composition of monolayer or multilayer (2 layers-several hundred of layers), and it has a required reflection character and transmittance character applying the interference of reflection light generated on the boundary plane of each layer.
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ก Name and Wavelength of Electromagnetic Wave
Name and Wavelength of Electromagnetic Wave
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ก Quality Control related Matters
Spectrophotometer
The optical characters of our products are measured by the spectrophotometer and warranted by means of conducting the minute measurement.
Evaporation Equipment Operation

ƒ--Spectrophotometer

Evaporation Equipment Operation -„


Laser Interferometer
The plane straightness of our products is measured by the laser interferometer.
Inspection

ƒ--Laser Interferometer

Inspection --„


Digital Microscope
The general view (flaw, strain), angle and dimension of the substrate surface are measured by the digital microscope.
Evaporation Equipment Operation

ƒ--Digital Microscope

Evaporation Equipment Operation--„


Laser Microscope
The surface shape of our products is measured by the laser microscope which measures depth with no-break and no-contact. Its accuracy is 0.01 ƒสm .(Magnification:250-2,500)
 

ƒ--Laser Microscope 

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KAWAI OPTICS CO.,LTD KAWAI OPTICS CO.,LTD. 1157-584 Hotozawa Gotemba-city Shizuoka-pref. Japan 412-0046
TEL.81-550-89-5481 FAX.81-550-89-7603